Chinese manufacturer SMEE has launched mass production of its SSC800 and SSB800 semiconductor lithography systems. According to TrendForce, these units are comprised of over 90 percent locally sourced components and have already processed more than 10 million silicon wafers in total.
The SSC800 model utilizes KrF DUV technology for manufacturing chips at 110 nm and above, targeting AI systems, high-performance computing, and memory. The SSB800 uses I-line technology for 280 nm processes, suitable for power semiconductors, analog chips, and MEMS.
Both systems feature domestically developed projection optics and a dual-stage wafer handling system. SMEE reports that the equipment's performance and layer alignment accuracy are comparable to international counterparts, with an operational availability exceeding 92 percent.
SMEE, founded in 2002, remains the only Chinese company capable of supplying serial dry projection lithography systems. The manufacturer has been subject to US export restrictions since December 2022. The new units were showcased at the CIIE exhibition in Shanghai.
