Hardware
IMECAS Explores DUV-Based GAA Transistors for 3nm Nodes
IMECAS has demonstrated functional GAA transistors using DUV lithography, marking a step toward 3nm-class development without EUV tools.
September 21, 2026, 03:30 PM·Tom

IMECAS has demonstrated functional GAA transistors using DUV lithography, marking a step toward 3nm-class development without EUV tools.

The Chinese Academy of Sciences has developed a GAA transistor architecture that could enable 3 nm-class performance using existing DUV lithography tools.

The Chinese Academy of Sciences has developed a GAA transistor architecture compatible with DUV lithography to advance chip manufacturing without EUV equipment.
