The first serial Russian lithography system, developed by the Zelenograd Nanotechnology Center (ZNTC) in collaboration with the Belarusian company Planar, is scheduled for delivery in December 2026. The initial recipient is the Mapper company, a subsidiary of Rostec.
The base model of the lithograph, which features a 350 nm resolution, is priced at 392 ₽ million. With extended service and a five-year warranty, the cost increases to 561 ₽ million. The system is designed for processing wafers up to 200 mm in diameter and utilizes a solid-state laser.
A second unit is designated for the company Otrasevye Resheniya, part of the Element group. The ZNTC is also working on a next-generation 130 nm lithography system, with research and development costs totaling 5.7 ₽ billion. Serial production for this model is expected to begin in 2027.
The Mapper facility, located in Technopolis Moscow, specializes in MEMS production. The company is currently involved in a Ministry of Industry and Trade project aimed at producing 11,500 infrared detectors annually by 2028, with investments for the production chain reaching up to 15 ₽ billion per facility.
